| Equipment/wiring type | Core parameters | Technical indicators | Application scenarios |
| Gas source pressure reducing device | Material/Leakage rate/pressure reduction accuracy | 316L BA grade valve body, leakage rate ≤2×10⁻⁸ atm, pressure fluctuation ±0.5% after secondary pressure reduction | Terminal pressure reduction of inert gases such as nitrogen and argon |
| Specialty gas cabinet（GC） | Alarm pressure/Material/control mode | The pressure alarm threshold is 0.1-0.3MPa, the inner tube is SS316L-EP, and the PLC automatically switches the gas cylinder | Storage and transportation of highly toxic gases such as SiH₄/PH₃ |
| Gas distribution cabinet（VMB） | Number of interfaces/gas compatibility/flow range | 8-12 interfaces, compatible with corrosive gases, maximum flow rate 500L/min | Gas distribution for lithography/deposition processes |
| Welded wiring | Material/Insulation grade/temperature resistance range | 316L stainless steel sheath, FEP insulation layer, temperature resistance -60℃ to 200℃, grounding resistance of the shielding layer < 1Ω | Valve position feedback signal transmission |
| Ferrule wiring | Connection method/pressure resistance grade/leakage rate | VCR double ferrule joint, with a pressure resistance of 3000PSI and a leakage rate of ≤1×10⁻⁹ Pa·m³/s | Connection of sampling pipelines for analytical instruments |
| Gas detection sensor | Detection accuracy/response time/signal output | The oxygen sensor has an accuracy of ±1%FS, a response time of less than 10 seconds, and a 4-20mA analog signal output | Main pipe leakage monitoring and safety interlock |
| Equipment/wiring type | Core parameters | Technical indicators | Application scenarios |
| Gas source pressure reducing device | Material/Leakage rate/pressure reduction accuracy | 316L BA grade valve body, leakage rate ≤2×10⁻⁸ atm, pressure fluctuation ±0.5% after secondary pressure reduction | Terminal pressure reduction of inert gases such as nitrogen and argon |
| Specialty gas cabinet（GC） | Alarm pressure/Material/control mode | The pressure alarm threshold is 0.1-0.3MPa, the inner tube is SS316L-EP, and the PLC automatically switches the gas cylinder | Storage and transportation of highly toxic gases such as SiH₄/PH₃ |
| Gas distribution cabinet（VMB） | Number of interfaces/gas compatibility/flow range | 8-12 interfaces, compatible with corrosive gases, maximum flow rate 500L/min | Gas distribution for lithography/deposition processes |
| Welded wiring | Material/Insulation grade/temperature resistance range | 316L stainless steel sheath, FEP insulation layer, temperature resistance -60℃ to 200℃, grounding resistance of the shielding layer < 1Ω | Valve position feedback signal transmission |
| Valve position feedback signal transmission | Connection method/pressure resistance grade/leakage rate | VCR double ferrule joint, with a pressure resistance of 3000PSI and a leakage rate of ≤1×10⁻⁹ Pa·m³/s | Connection of sampling pipelines for analytical instruments |
| Gas detection sensor | Detection accuracy/response time/signal output | The oxygen sensor has an accuracy of ±1%FS, a response time of less than 10 seconds, and a 4-20mA analog signal output | Main pipe leakage monitoring and safety interlock |
Phone： 13764553949
Fax： 13764553949
Email： howard.huang@sh-easytech.com
Address： Room 2007, Building 3, Jiefang Mansion, Zhucheng Road, Xinzhuang Town, Minhang District, Shanghai