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Home Own Products High-Purity Gas Pipeline Project Gas distribution pipeline
High-purity bulk gas piping project
High-purity bulk gas piping project

High-purity bulk gas piping project

  • Harsh material
  • Clean construction
  • Safety redundancy
  • Dynamic regulation
  • Intelligent monitoring
  • System integration
CategoryCore moduleCore functionTechnical highlightsCompatible gas
High-purity pipeline systemStainless steel pipe（316L/BA/EP）Achieve ultra-high cleanliness gas transportation to avoid particle contamination and gas adsorptionInner wall roughness Ra≤0.4μm（EP）Electronic specialty gases (such as SiH₄, NH₃), high-purity nitrogen, hydrogen
Welding method: Fully automatic track welding (inert gas protected)
Rate of leakage≤1×10⁻⁹ Pa·m³/s
Pipe fittings (ferrule/welded type)Ensure that the system has no dead corners for connection to reduce the risk of gas retentionMaterial: 316L stainless steel (electrolytic polishing)Semiconductor lithography gas, laboratory standard gas
Sealing method: VCR metal surface seal/Double ferrule (without elastomer)
Applicable pressure: Vacuum to 3000psi
Special valve assemblyHigh-purity diaphragm valveZero dead volume cut-off, avoiding medium residue and cross-contaminationValve body material: 316L (EP grade)Ultra-high purity oxygen, medical-grade nitrous oxide
Diaphragm material: PTFE/EPDM (Temperature resistance -40℃ to +180℃)
Operation mode: Manual/Pneumatic/electric
Gas pressure reducerPrecisely control the downstream gas pressure to ensure the stability of the system pressureAdjustment accuracy: ±0.5% full scaleGas cylinder manifold, gas distribution panel
Import pressure: Up to 3000psi
Outlet pressure range: 0 to 1000psi (Multiple Settings available)
Gas purification equipmentHigh-efficiency filter (ULPA gradeRemove particles ≥0.1μm from the gas, with a filtration efficiency of ≥99.999%Filter element material: PTFE/ borosilicate fiberAll high-purity gas terminals are filtered
Maximum flow rate: 500Nm³/h (single tube)
Differential pressure alarm function (optional
Dehydration/deoxidation purification moduleReduce the H₂O and O₂ impurities in the gas to the ppb levelDehydration depth: ≤-100℃ dew pointHigh-purity argon gas for the electronics industry and high-purity nitrogen for laser cutting
Deoxidation depth: ≤5ppb
Regeneration method: Thermal regeneration/inert gas purging
Monitoring and control systemOnline purity analyzerReal-time monitoring of the concentration of trace impurities (H₂O/O₂/ particles) in the gasDetection accuracy: ppb grade (H₂O/O₂)The main pipeline for specialty gas transportation and the outlet of the gas purification system
Response time: ≤10 seconds
Data output：4-20mA/RS485
Pressure/flow monitoring unitContinuously monitor pipeline pressure and flow, and automatically alarm in case of abnormal conditionsPressure accuracy：±0.1%FSGas distribution system, gas intake control for reaction vessels
Flow range：0.1~1000Nm³/h（Mass flowmeter）
Support interlock control output


Parameter categoryHigh-purity pipeline systemSpecial valve assemblyGas purification equipmentMonitoring and control system
Material and cleanlinessPipe: 316L stainless steel (EP grade)Valve body: 316L (EP)Filter element: borosilicate fiber (ULPA grade)Sensor material: Hastelloy C276/PTFE
Inner wall finish: Ra≤0.2μm (electrolytic polishing)Seal: PTFE (Food grade)Purification materials: Activated alumina/metal catalystEnclosure protection: IP65 (Field instrument)
Particle pollution：≤10个/ft³（≥0.1μm）Internal volume: ≤0.5mL (micro valve)Shell material: 316L stainless steelSampling pipeline: 316L (BA grade)
Pressure and temperature rangeWorking pressure: Vacuum ~15MPa (depending on pipe diameter)Working pressure: Vacuum ~6000psi (high-pressure valve)Work pressure：0~10MPaPressure measurement range: 0 to 10MPa (gauge pressure)
Working temperature: -200℃ to +200℃ (liquid nitrogen/steam tracing)Working temperature：-196℃~+200℃Working temperature：-40℃~+80℃Temperature compensation range：-20℃~+60℃
Blasting pressure: 4× design pressureLeakage rate：≤1×10⁻¹⁰ atm·cc/s（He）Pressure drop: ≤0.1bar (at rated flow)Flow measurement accuracy: ±0.5% reading (mass flowmeter)
Performance and reliabilityWelding qualification rate: ≥99.9% (X-ray inspection)Valve cycle life: ≥ 100,000 times (pneumatic diaphragm valve)Filter life: 6 to 12 months (depending on the cleanliness of the gas)Analyzer drift: ≤1%FS/year
System pressure holding time: ≥24 hours (pressure drop ≤0.5%)Pressure reducer stability: ≤0.1%/h (when the inlet pressure fluctuates by 10%)Purification module capacity: ≥500Nm³ (when H₂O≤1ppb)Data recording capacity: ≥1 year (1-minute interval)
Service life: ≥15 years (under normal working conditionsSeismic resistance grade: IEC 60068-2-6 (10g acceleration)Regeneration cycle: 3 to 6 months (depending on the operating conditions)Mean Time between Failures (MTBF) : ≥ 50,000 hours
Certification and StandardsMeet the standards：SEMI F20、ASTM A270Certification: ATEX, FM (Explosion-proof type)Filtration efficiency certification: EN 1822-5 (ULPA 15)Instrument accuracy certification: ISO 9001
Cleanliness certification：ISO 14644-1 Class 1Sealing standard：ISO 10297Purification performance：SEMI C3.32Communication protocol：MODBUS RTU/Profinet
Welding standard：ASME B31.3Material certification：FDA 21 CFR 177.1550Safety certification：CE、ULSafety level: SIL 2 (Interlock Control)



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